Single-shot 3D topography of reflective samples with digital holographic microscopy
Single-shot 3D topography of reflective samples with digital holographic microscopy
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DOI：
10.1364/ao.57.000a12
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发表时间：
2018-01-01
期刊：
影响因子：
1.9
通讯作者：
Garcia-Sucerquia, Jorge
中科院分区：
文献类型：
--
作者：
Castaneda, Raul;Garcia-Sucerquia, Jorge
在这项工作中，一个离轴数字全息显微镜操作在反射模式和远心方案，以产生显微镜样品的三维地形显示。所提出的方法的主要特点，使其与该领域的先前工作不同，是可以通过单次拍摄产生三维地形，灵敏度为lambda/100，没有照明成像系统引入的相位扰动，并且除了恢复样品的相位图所需的数值处理之外，没有进一步的数值处理。对数字全息显微镜的照明成像系统进行了全面的分析。在美国空军分辨率测试靶和微机电系统上对所设计的数字全息显微镜进行了成像测试。(C) 2017年美国光学学会
In this work, an off-axis digital holographic microscope operating in reflection mode and a telecentric regimen to produce 3D topography of a microscopy sample is shown. The main characteristics of the proposed method, which make it different from the previous works in the field, are the possibility of producing the 3D topography by a single shot over the complete field of view with sensitivity of lambda/100, without phase perturbations introduced by the illuminating-imaging system, and with no further numerical processing beyond that required for recovering the phase map of the sample. A complete analysis of the illuminating-imaging system of the digital holographic microscope is presented. The proposed digital holographic microscope is tested on imaging a USAF resolution test target and some micro-electromechanical systems (MEMs). (C) 2017 Optical Society of America