Masayoshi Nakayama: "Focused ion beam etcking of resist/Ni maltilayer films and application to metal island structure formation" Journal of Vacuum Science and Technology B. 16・4. 2511-2514 (1998)
Masayoshi Nakayama: "Focused ion beam etcking of resist/Ni maltilayer films and application to metal island structure formation" Journal of Vacuum Science and Technology B. 16・4. 2511-2514 (1998)
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Masayoshi Nakayama:“抗蚀剂/Ni多层膜的聚焦离子束蚀刻及其在金属岛结构形成中的应用”真空科学技术杂志B.16・4(1998)。
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