Exploiting intermolecular interactions and self-assembly for ultrahigh resolution nanolithography
Exploiting intermolecular interactions and self-assembly for ultrahigh resolution nanolithography
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DOI：
10.1116/1.1515301
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发表时间：
2002-11-01
影响因子：
1.4
通讯作者：
Weiss, PS
中科院分区：
文献类型：
--
作者：
Anderson, ME;Smith, RK;Weiss, PS
自组装、定向组装和定位组装技术的结合，即“自下而上”的制造，对于构图和连接未来的纳米器件将是必不可少的。系统地探索表面上的局部分子间相互作用将允许它们被用于合理设计分子尺度的表面结构。我们利用扫描隧道显微镜在纳米尺度上探索自组装膜的局域行为。控制分子在自组装单分子层内和通过自组装单分子层放置的能力是表面图案化的一种手段。通过控制膜形成的动力学可以得到具有定制特征的单分子膜，膜的形成受到吸附物质和膜内自然存在的结构成分的选择性分子间相互作用的严重影响。此外，由α，omega-巯基烷酸和配位金属离子的交替层形成的自组装多层膜的位置和厚度可以得到控制，以形成精确的“分子尺子”抗蚀剂，并有助于形成量身定制的、光刻定义的金属接触。(C)2002年美国真空协会。
The combination of self-, directed, and positional assembly techniques, i.e., "bottom up" fabrication, will be essential for patterning and connecting future nanodevices. Systematic exploration of local intermolecular interactions on surfaces will permit their exploitation for the rational design of molecular-scale surface structures. We use the scanning tunneling microscope to probe the local behavior of self-assembled films at the nanometer scale. The ability to control, the molecular placement within and by self-assembled monolayers is a means of patterning surfaces. A monolayer with customized features can be produced by manipulating the dynamics of film formation, which are heavily affected by the selectable intermolecular interactions of adsorbates and the structural components naturally occurring within the films. Additionally, the controlled placement and thickness of self-assembled multilayers created from alternating strata of alpha,omega-mercaptoalkanoic acids and coordinated metal ions can be developed to form precise "molecular ruler" resists and to assist in the formation of tailored, lithographically defined metal contacts. (C) 2002 American Vacuum Society.