Focused Ion Beam (FIB): A novel technology for advanced application of micro- and nanoanalysis in geosciences and applied mineralogy
Focused Ion Beam (FIB): A novel technology for advanced application of micro- and nanoanalysis in geosciences and applied mineralogy
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DOI：
10.1127/0935-1221/2004/0016-0863
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发表时间：
2004-11-01
影响因子：
2.1
通讯作者：
Wirth, R
中科院分区：
文献类型：
--
作者：
Wirth, R
聚焦离子束（FIB）工具已成功地用作制备特定位置的TEM箔用于随后的TEM分析的手段，以及用于材料微加工的独立仪器。利用FIB技术制备TEM薄片的方法极大地改变了传统的TEM样品制备方法，因为它允许特定位置的薄片制备。FIB包括通过在大块样品上进行Ga离子铣削来切割电子透明箔。光学显微镜连同显微操作器用于将箔从试样转移到涂覆有多孔碳支撑膜的TEM网格。不需要进一步的碳涂层。这项新技术在从矿物、晶界、微体化石、基底上的薄膜和各种涂层中的夹杂物制备特定位置的TEM箔的精度和速度方面提供了显着的优势。FIB切割的TEM箔可以用现代TEM技术进行研究，例如各种衍射技术，分析电子显微镜（AEM），包括线扫描和元素映射，电子能量损失谱（EELS）和高分辨率电子显微镜（HREM）。自2002年秋季以来，我们在德国波茨坦玻璃研究所使用FIB仪器（FEI FIB 200）制备并研究了数百种高质量的硅酸盐、碳酸盐、金属合金、陶瓷材料和金刚石TEM箔。
The Focused Ion Beam (FIB) tool has been successfully used as both a means to prepare site-specific TEM foils for subsequent analysis by TEM, as well as a stand-alone instrument for micromachining of materials. TEM foil preparation with FIB technique has drastically changed traditional TEM specimen preparation because it allows site-specific foil preparation. FIB consists of cutting electron transparent foils through Ga-ion milling on a bulk sample. Optical microscopy together with a micromanipulator is used to transfer the foil from the specimen to a TEM grid coated with a holey carbon support film. No further carbon coating is required. This novel technology offers significant benefits in precision and speed of preparing site-specific TEM foils from inclusions in minerals, grain boundaries, microfossils, thin films on substrates and various coatings. FIB cut TEM foils can be investigated with modem TEM techniques such as various diffraction techniques, analytical electron microscopy (AEM) including line scan and elemental mapping, electron energy-loss spectroscopy (EELS) and high-resolution electron microscopy (HREM). With the FIB instrument (FEI FIB200) operated since fall 2002 at GFZ Potsdam we have prepared and investigated several hundreds of high quality TEM foils from silicates, carbonates, metals alloys, ceramic materials and diamond.