Precise tailoring of multiple nanostructures based on atomic layer assembly via versatile soft-templates
Precise tailoring of multiple nanostructures based on atomic layer assembly via versatile soft-templates
复制标题
通过多功能软模板基于原子层组装精确定制多个纳米结构
DOI：
10.1016/j.nantod.2021.101145
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发表时间：
2021-04-13
期刊：
影响因子：
17.4
通讯作者：
Li, Junjie
中科院分区：
文献类型：
--
作者：
Geng, Guangzhou;Zhu, Wei;Li, Junjie
纳米器件对纳米结构的尺寸、形状和空间排列及其纳米级组装的调整提出了更高的要求，然而，这往往超出了传统光刻或自组装技术的范围。鉴于此，我们开发了基于软模板的原子层组装纳米加工技术，突破了传统刚性模板的限制，具有很好的可扩展性和强大的多种实心或空心纳米结构的制造能力。多功能软模板可以通过成熟的光刻工艺在纳米尺度上自由图案化，精确控制的原子层沉积可以组装高纵横比的纳米结构，并灵活定制尺寸、形状和空间阵列，然后干蚀刻工艺去除软支架，并在大面积、刚性或软基底上留下独立的纳米结构。为了突出这种制造策略的潜力，展示了高性能光学超表面和超灵敏 H-2 气体传感器。这种方法赋予传统的光刻和组装技术在纳米制造方面具有新的强大功能和更大的可扩展性，为生成复杂的多重纳米结构提供了一条简单有前景的途径，从而在现代纳米器件中得到广泛应用。 (C) 2021 Elsevier Ltd. 保留所有权利。
Nanodevices have higher requirements for nanofabrication in tuning the size, shape and spatial arrangement of nanostructures and their assemblies in nanoscale, however, which are often beyond the reach of conventional lithography or self-assembly techniques. In view of the above, we develop atomic layer assembled nanofabrication based on soft-templates to break through the limitations of traditional rigid templates, having very well scalability and powerful fabrication capability for multiple solid or hollow nanostructures. Versatile soft-templates can be freely patterned at the nanoscale by mature lithographic processes, along which a precisely controlled atomic layer deposition can assemble high-aspect-ratio nanostructures with a flexible tailoring of the size, shape and spatial array, and then a dry etching process removes soft scaffolds and leaves freestanding nanostructures over large-area, rigid or soft substrates. To highlight the potentials of this fabrication strategy, the high-performance optical metasurface and ultra sensitive H-2 gas sensor are demonstrated. This approach endows the conventional lithography and assembly techniques with new powerful functionalities and more scalability in nanofabrication, providing a simply promising route to generating complex multiple nanostructures, towards a broad application in modern nanodevices. (C) 2021 Elsevier Ltd. All rights reserved.