A Highly Sensitive Flexible Capacitive Tactile Sensor with Sparse and High-Aspect-Ratio Microstructures
A Highly Sensitive Flexible Capacitive Tactile Sensor with Sparse and High-Aspect-Ratio Microstructures
复制标题
一种具有稀疏和高深宽比微结构的高灵敏度柔性电容式触觉传感器
DOI：
10.1002/aelm.201700586
复制
发表时间：
2018-04-01
影响因子：
6.2
通讯作者：
Guo, Chuan Fei
中科院分区：
文献类型：
--
作者：
Wan, Yongbiao;Qiu, Zhiguang;Guo, Chuan Fei
高灵敏度的柔性触觉传感器可以以低成本和高效的方式制造，在智能软机器人和友好的人机交互中有很大的需求。本文利用荷叶仿生微图案化聚二甲基硅氧烷（m-PDMS）研制了一种高灵敏度的柔性触觉传感器。m-PDMS衬底由高纵横比和低密度的微塔组成，并被作为底部电极的银银纳米线覆盖。该电容传感器由底部电极、无色聚酰亚胺介质层和顶部电极构成，具有约1.2 k Pa-1的高灵敏度、< 0.8 Pa的超低检测限和36 ms的快速响应时间。有限元分析表明，稀疏且高纵横比的微塔是实现高灵敏度的关键，检测限低，对外部刺激的响应快。柔性触觉传感器还具有高鲁棒性：可以测试至少100，000次循环而不会显示疲劳。更重要的是，柔性触觉传感器在智能软机器人、健康监测和运动检测方面具有潜在的用途。此外，该制作策略也可为其他微结构的设计提供指导，以提高柔性触觉传感器的性能。
Highly sensitive flexible tactile sensors that can be fabricated in a low cost and efficient way are in great demand for intelligent soft robotics and friendly human-machine interaction. Herein, a highly sensitive flexible tactile sensor is developed by using bionic micropatterned polydimethylsiloxane (m-PDMS) replicated from lotus leaf. The m-PDMS substrate consists of high-aspect-ratio and low-density microtowers, and is covered by ultrathin silver nanowires as a bottom electrode. The capacitive sensing device is constructed by sandwiching the bottom electrode, a colorless polyimides dielectric layer, and a top electrode, and exhibits a high sensitivity of approximate to 1.2 k Pa-1, a ultralow limit of detection < 0.8 Pa, and a fast response time of 36 ms. The finite-elemental analysis indicates that the sparse and high-aspect-ratio microtowers are critical to achieve high sensitivity, low limit of detection, and fast response to external stimulus. The flexible tactile sensor also exhibits high robustness: it can be tested for at least 100 000 cycles without showing fatigue. More importantly, the flexible tactile sensors are potentially useful in intelligent soft robots, health monitoring, and motion detection. Besides, the fabrication strategy may offer a guideline to design other microstructures for improving the performance of flexible tactile sensors.