Ultrathin Highly Flexible Featherweight Ceramic Temperature Sensor Arrays
Ultrathin Highly Flexible Featherweight Ceramic Temperature Sensor Arrays
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DOI：
10.1021/acsami.0c08718
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发表时间：
2020-08-12
影响因子：
9.5
通讯作者：
Tsuchiya, Tetsuo
中科院分区：
文献类型：
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作者：
Nakajima, Tomohiko;Tsuchiya, Tetsuo
我们在超薄（5 μ m厚）和轻质（21 mg）聚酰亚胺片上制备了高度柔性的Sr和ni掺杂钙钛矿SmMnO3热敏电阻薄膜传感器阵列，用于医疗监测设备。采用精确控制的聚酰亚胺表面激光碳化法制备了银纳米线和纳米颗粒浸渍碳微锥阵列，其作为底电极具有较低的电阻和良好的抗锐角稳定性。用脉冲紫外激光照射钙钛矿纳米颗粒分散油墨印刷的前驱体膜，晶化出厚度为900 nm的点状（直径900 μ m）钙钛矿热敏电阻薄膜，薄膜具有良好的热敏电阻性能，热敏电阻常数为2820 K。该热敏电阻传感器片在室温至80℃的1000多次温度循环试验中表现出对温度变化的快速响应和高稳定性，在60度弯曲角度和小弯曲半径（500 μ m）下的弯曲耐久性也很高。在超过1000次的弯曲测试中，监测温度变化被抑制在0.1℃以内。这种超薄传感器阵列片可以安装在形状变化的表面上，我们将传感器用于医疗保健的实时监测，以检测人体运动时皮肤上的精确温度变化。
We fabricated highly flexible Sr- and Ni-doped perovskite SmMnO3 thermistor film sensor arrays on an ultrathin (5 mu m thick) and lightweight (21 mg) polyimide sheet for healthcare monitoring devices. The Ag nanowire and nanoparticle-impregnated carbon microcone array, which was prepared by precisely controlled surface laser carbonization of polyimide, showed sufficiently low resistance as a bottom electrode and good stability against sharp bending angles. The dot-shaped (diameter: 900 mu m) perovskite thermistor film with a thickness of 900 nm was crystallized by pulsed ultraviolet laser irradiation of a precursor film printed with perovskite nanoparticle dispersion ink, and the film functioned well as the thermistor with a thermistor constant of 2820 K. The thermistor sensor sheet exhibited rapid responses to temperature variation and high stability in the temperature cycle tests over 1000 cycles between room temperature and 80 degrees C. The bending durability for a bending angle of 60 degrees with a small bending radius (500 mu m) was also high. During the bending test over 1000 cycles, the monitoring temperature variation was suppressed only within 0.1 degrees C. This ultrathin sensor array sheet can be mounted on surfaces with shape variations, and we used the sensor for real-time monitoring in healthcare to detect precise temperature variations on the human skin during physical exercise.