Effects of crystallographic surface and co-sputtered atom on the growth of ion-sputter induced Si nanocone arrays
Effects of crystallographic surface and co-sputtered atom on the growth of ion-sputter induced Si nanocone arrays
复制标题
晶体表面和共溅射原子对离子溅射诱导硅纳米锥阵列生长的影响
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
陆明
中科院分区:
文献类型:
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作者:
陆明