Deposition of LiNbO3 thin films on diamond/Si(100) substrates for high frequency surface acoustic wave filter applications
Deposition of LiNbO3 thin films on diamond/Si(100) substrates for high frequency surface acoustic wave filter applications
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在金刚石/Si(100) 基底上沉积 LiNbO3 薄膜，用于高频表面声波滤波器应用
DOI：
10.1080/10584589908210158
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发表时间：
1999
影响因子：
0.7
通讯作者：
M. Robert
中科院分区：
文献类型：
--
作者：
Shunxi Wang;T. Rabson;Q. Su;M. Robert
摘要 电信领域需要工作频率高达千兆赫的滤波器，以提高数据传输速率。这项研究的目标是通过在金刚石涂层硅芯片上制造LiNbO3薄膜表面声波滤波器器件来生产用于前端射频滤波器的低插入损耗的千兆赫电子滤波器。本文报道了通过金属有机分解过程在金刚石/Si(100) 基底上沉积LiNbO3 薄膜。 X射线衍射分析表明，该薄膜是具有(012)取向的高度织构多晶LiNbO3。平面图和横截面扫描电子显微镜表明LiNbO3薄膜具有致密、光滑的表面，没有裂纹和孔隙，并且它们与金刚石/Si(100)基底的粘附性很好。晶粒尺寸在〜0.2–0.5μm范围内。原子力显微镜显示平均表面粗糙度约为 25 nm。
Abstract Filters operating at high frequencies up to gigahertz are required in telecommunications in order to increase the rate of data transmission. The goal of this research is to produce gigahertz electronical filters with low insertion loss for front-end radio frequency filters by fabricating LiNbO3 thin film surface acoustic wave filter devices on diamond-coated silicon chips. In this paper, the deposition of LiNbO3 thin films on diamond /Si(100) substrates by a metal-organic decomposition process is reported. X-ray diffraction analysis shows that the films are highly textured polycrystalline LiNbO3 with a (012) orientation. Planview and cross-section scanning electron microscopy indicate that the LiNbO3 thin films have dense, smooth surfaces without cracks and pores, and they adhere very well to the diamond /Si(100) substrates. The grain size is in the range of ∼0.2–0.5 μm. Atomic force microscopy reveals an average surface roughness of about 25 nm.