Fabrication and Characterizations of Microelectromechanical Systems (MEMS) Thermal Conductivity Gas Sensor
Fabrication and Characterizations of Microelectromechanical Systems (MEMS) Thermal Conductivity Gas Sensor
复制标题
微机电系统 (MEMS) 热导气体传感器的制造和表征
DOI：
10.1166/jno.2018.2373
复制
发表时间：
2018-07
影响因子：
0.6
通讯作者：
Liu Xin-Lei
中科院分区：
文献类型：
--
作者：
Hong-Quan Zhang;Bin Shen;Liu Xin-Lei
针对头部式热导式气体传感器存在的电阻色散大、补偿器匹配困难等问题，提出了一种基于MEMS技术的微机电系统（MEMS）热导式气体传感器。采用微机械加工方法在Al2O3上原位生长陶瓷膜，制备传感器载体，采用印刷工艺制备pt敏感加热电极。通过对敏感元件的非密封封装和补偿元件的密封封装，最终制成导热传感器。基于仿真方法，讨论了传感器的温度和应力特性。实验结果表明，所制备的MEMS热导式气体传感器具有良好的导热性能，敏感加热电极的零电阻在2 +/- 0.2 ω范围内。在恒定电压下，传感器对CH4气体的满量程响应值为36my，范围为0，近似于100%，传感器输出与CH4气体浓度呈良好的线性关系
Aiming at solving the problems of large resistance dispersion and difficult compensator matching of beadtype thermal conductivity gas sensors, a microelectromechanical systems (MEMS) thermal conductivity gas sensor is proposed which was fabricated based on MEMS technology. Sensor carrier was made by micromachining in situ growth of ceramic membrane on Al2O3 and Pt-sensitive heating electrode was formed by printing process. Thermal conductivity sensor was finally fabricated by non-hermetic packaging of sensitive components and hermetic packaging of compensation components. The temperature and stress characteristics of the fabricated sensor were also discussed based on the simulation method. The detailed experiments revealed that the fabricated MEMS thermal conductivity gas sensors are greatly thermally conductive and the zero-resistance of sensitive heating electrode was in the range of 2 +/- 0.2 Omega. The full-scale response value of the sensor was 36 my at constant voltage for the CH4 gas in the range of 0 similar to 100% and it shows a good linear relationship between the sensor output and CH4 gas concentration