Porosification behaviour of LTCC substrates with potassium hydroxide
Porosification behaviour of LTCC substrates with potassium hydroxide
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DOI：
10.1016/j.jeurceramsoc.2018.01.017
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发表时间：
2018-05
影响因子：
5.7
通讯作者：
A. Hajian;M. Stöger-Pollach;M. Schneider;Doruk Müftüoglu;Frank K. Crunwell;U. Schmid
中科院分区：
文献类型：
--
作者：
A. Hajian;M. Stöger-Pollach;M. Schneider;Doruk Müftüoglu;Frank K. Crunwell;U. Schmid
满足先进的基板要求的电，机械，热，和介电性能方面的需求，导致了低温共烧陶瓷（LTCC）的兴趣越来越大。然而，LTCC材料具有高介电常数。我们最近发现，在酸性条件下的湿化学多孔化可以降低低温共烧陶瓷的介电常数。在本研究中，氢氧化钾溶液被用作替代蚀刻剂，其具有用于进一步金属化线的合适的承载平面。各种表征技术，包括扫描和透射电子显微镜，能量色散X-射线光谱，X-射线衍射分析，和电子能量损失谱被用于调查的形态和化学成分的基板。通过MeX® Alicona软件获得表面形貌的三维信息，并且获得的粗糙度参数证实了所提出的方法在针对增强的表面质量时优于酸处理。
The demand to meet advanced substrate requirements in terms of electrical, mechanical, thermal, and dielectric properties has led to an increasing interest in low temperature co-fired ceramics (LTCC). However, LTCC materials suffer from high permittivity. We recently showed that the wet-chemical porosification under acidic conditions allows the reduction of the permittivity of LTCCs in theas-firedstate. In the present study, potassium hydroxide solution was employed as an alternative etchant which features a suitable bearing plane for further metallization lines. Various characterization techniques, including scanning and transmission electron microscopy, energy-dispersive X-ray spectroscopy, X-ray diffraction analysis, and electron energy loss spectroscopy were used for investigation of the morphology and chemical composition of the substrates. Three-dimensional information of the surface topography was acquired by means of MeX®Alicona software and the obtained roughness parameters confirmed the advantage of the proposed approach over acid treatment when targeting an enhanced surface quality.