Electrostatic micromachine scanning mirror for optical coherence tomography
Electrostatic micromachine scanning mirror for optical coherence tomography
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DOI：
10.1364/ol.28.000628
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发表时间：
2003-04-15
期刊：
影响因子：
3.6
通讯作者：
Smith, SW
中科院分区：
文献类型：
--
作者：
Zara, JM;Yazdanfar, S;Smith, SW
描述了用于光学相干层析成像（OCT）系统扫描臂的紧凑静电微镜结构。这些装置由毫米级反射镜组成，反射镜放置在微米级聚酰亚胺铰链上，该铰链由线性微机械执行器（集成力阵列）倾斜。IFA是一个可变形的电容器电池网络，当施加电压时，它会静电收缩。支撑结构、铰链和驱动器由聚酰亚胺硅片光刻制成。这些装置被插入到实验OCT成像系统的扫描臂中，以4至8 Hz的帧率产生体外和体内图像。(C) 2003年美国光学学会。
Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz. (C) 2003 Optical Society of America.