Encapsulated Silicon Nitride Nanobeam Cavity for Hybrid Nanophotonics
Encapsulated Silicon Nitride Nanobeam Cavity for Hybrid Nanophotonics
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DOI：
10.1021/acsphotonics.8b00036
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发表时间：
2018-06-01
期刊：
影响因子：
7
通讯作者：
Majumdar, Arka
中科院分区：
文献类型：
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作者：
Fryett, Taylor K.;Chen, Yueyang;Majumdar, Arka
由于氮化硅光子晶体的折射率低，大多数现有的实现依赖于悬浮膜。这种漂浮膜的机械强度不高，使得它们不适合开发混合光电平台，在这种平台上，新材料（如分层二维材料）被转移到预制的光学腔中。为了解决这个问题，我们设计并制造了一种氮化硅纳米束谐振器，其中氮化硅膜被折射率接近1.5的材料（如二氧化硅或PMMA）封装。理论计算得到的空腔质量因子可达10(s)，模态体积为2.S(lambda/n)(3)。我们制作了腔体并测量了透射光谱，最高质量因子达到7000。我们还成功地将单层二硒化钨转移到封装的氮化硅纳米梁上，并证明了空腔与单层激子和缺陷发射的耦合。
Most existing implementations of silicon nitride photonic crystal cavities rely on suspended membranes due to their low refractive index. Such floating membranes are not mechanically robust, making them suboptimal for developing a hybrid optoelectronic platform where new materials, such as layered 2D materials, are transferred onto prefabricated optical cavities. To address this issue, we design and fabricate a silicon nitride nanobeam resonator where the silicon nitride membrane is encapsulated by material with a refractive index of similar to 1.5, such as silicon dioxide or PMMA. The theoretically calculated quality factor of the cavities can be as large as 10(s), with a mode-volume of, similar to 2.S(lambda/n)(3). We fabricated the cavity and measured the transmission spectrum with the highest quality factor reaching 7000. We also successfully transferred monolayer tungsten diselenide on the encapsulated silicon nitride nanobeam and demonstrated coupling of the cavity with both the monolayer exciton and the defect emissions.