Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates
Application of projection lithography using a gradient-index lens array and wet etching to texturing for control of the hydrophobic properties of stainless-steel plates
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DOI：
10.7567/1347-4065/ab0543
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发表时间：
2019-05
影响因子：
1.5
通讯作者：
T. Horiuchi;Yutaka Kazama;Hiroya Yoshida;A. Yanagida;Hiroshi Kobayashi
中科院分区：
文献类型：
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作者：
T. Horiuchi;Yutaka Kazama;Hiroya Yoshida;A. Yanagida;Hiroshi Kobayashi
研究了在SUS 304不锈钢板上开槽的线和空间（L&S）织构对改善疏水性能的有效性。使用具有梯度折射率透镜阵列作为投影透镜的扫描投影曝光系统和在氯化铁水溶液中的湿化学蚀刻来对纹理进行开槽。该光刻系统的应用是因为它是为在50平方毫米的大曝光场中印刷大于15 μm的粗糙图案而开发的。另一方面，预期具有相当尖锐的峰的纹理化突起可通过湿法蚀刻期间的底切现象形成。测量了2 μl纯水滴滴在20 μm L&S织构上的接触角，发现从L&S方向观察水滴测得的接触角大于从垂直于L& S方向观察水滴测得的接触角，并且接触角随织构尺寸的不同而变化。
The effectiveness of line-and-space (L&S) textures grooved onto stainless-steel SUS 304 plates for improving hydrophobic properties was investigated. The textures were grooved using a scan-projection exposure system with a gradient-index lens array as a projection lens and wet chemical etching in ferric chloride aqueous solution. The lithography system was applied because it was developed for printing rough patterns of larger than 15 μm in a large exposure field of 50 mm square. On the other hand, it was expected that textured protrusions with considerably sharper peaks might be formed by the undercut phenomenon during wet etching. When the contact angles of 2 μl pure-water droplets which had been dropped down onto 20 μm L&S textures were measured, it was found that contact angles measured by observing a droplet from the L&S direction were larger than those measured from the direction perpendicular to the L&S, and contact angles were changeable by grooving textures of different sizes.