Silicon resonant accelerometer with electronic compensation of input-output cross-talk
Silicon resonant accelerometer with electronic compensation of input-output cross-talk
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DOI：
10.1016/j.sna.2005.03.067
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发表时间：
2005-09-23
影响因子：
4.6
通讯作者：
Taroni, A
中科院分区：
文献类型：
--
作者：
Ferrari, V;Ghisla, A;Taroni, A
介绍了一种采用体硅微机械加工工艺制作的谐振式加速度计。该结构是由两个平行的柔性铰链作为双支撑悬臂支撑的地震质量体，在铰链之间具有谐振微梁。垂直于芯片平面的加速度在微梁中引起轴向应力，进而引起微梁谐振频率的成比例变化。根据分析计算和模拟，在原型上测量了约70 kHz的梁谐振频率和0-3 kHz范围内35 Hz/g的加速度灵敏度。微梁在大气压下不密封地工作，因此由于空气阻尼导致相对较低的品质因数。在这种情况下，输入-输出串扰的影响被发现是显着的。对串扰进行了分析和建模，并提出了一种电子有源补偿方法。将补偿后的传感器插入锁相环振荡器中进行测试。报告的实验结果表明，该传感器的性能与理论预测非常一致。(C)2005 Elsevier B. V.保留所有权利。
A resonant accelerometer manufactured in silicon bulk micromachining with electrothermal excitation and piezoresistive detection is presented. The structure is a seismic mass supported by two parallel flexure hinges as a doubly- sustained cantilever, with a resonating microbeam located between the hinges. The acceleration normal to the chip plane induces an axial stress in the microbeam and, in turn, a proportional change in the microbeam resonant frequency. Beam resonant frequency of around 70 kHz and acceleration sensitivity of 35 Hz/g over the range 0-3 kHz were measured on prototypes, in accordance with analytical calculations and simulations. The microbeam operates unsealed at atmospheric pressure, therefore a comparatively low quality factor results due to air damping. In this condition, the effect of the input-output cross-talk was found to be significant. The cross-talk is analyzed and modeled, and an electronic active compensation is proposed. The compensated sensor was inserted into a phase-locked loop oscillator and tested. Reported experimental results show that the sensor performs in excellent agreement with the theoretical predictions. (C) 2005 Elsevier B.V. All rights reserved.