Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy
Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy
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DOI：
10.1063/1.1555693
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发表时间：
2003-02-24
影响因子：
4
通讯作者：
Komvopoulos, K
中科院分区：
文献类型：
--
作者：
Chimmalgi, A;Choi, TY;Komvopoulos, K
超短脉冲激光辐射由于其对材料的热损伤和机械损伤小，是材料精密加工和表面纳米/微米改性的有效方法。这项研究表明，可控的表面纳米加工可以实现飞秒激光脉冲通过在近场的尖锐探针针尖的局部场增强。薄金膜的纳米加工是通过将800 nm飞秒激光辐射与环境空气中的硅尖端耦合来完成的。尖端下方的激光场强度的空间分布的时域数值预测的三阶差分证实，所观察到的高空间分辨率是由于局部电场的增强。可能的结构机制和影响这一过程的因素进行了讨论。本发明的方法提供了一种有趣的手段，由于在基板材料选择的灵活性，类似于10 nm的高空间分辨率（不可能与标准的纳米加工技术），和快速的处理速度，可通过同时照射的多阵列尖端实现大规模的纳米加工。(C)2003年，美国物理学会。
Ultrashort pulsed-laser radiation is an effective method for precision materials processing and surface nano-/micromodification because of minimal thermal and mechanical damage. This study demonstrates that controllable surface nanomachining can be achieved by femtosecond laser pulses through local field enhancement in the near-field of a sharp probe tip. Nanomachining of thin gold films was accomplished by coupling 800-nm femtosecond laser radiation with a silicon tip in ambient air. Finite-difference time-domain numerical predictions of the spatial distribution of the laser field intensity beneath the tip confirmed that the observed high spatial resolution is due to the enhancement of the local electric field. Possible structuring mechanisms and factors affecting this process are discussed. The present process provides an intriguing means for massive nanofabrication due to the flexibility in the substrate material selection, high spatial resolution of similar to10 nm (not possible with standard nanomachining techniques), and fast processing rates achievable through simultaneous irradiation of multiarray tips. (C) 2003 American Institute of Physics.