High-temperature crystallized thin-film PZT on thin polyimide substrates
High-temperature crystallized thin-film PZT on thin polyimide substrates
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DOI：
10.1063/1.4990052
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发表时间：
2017-10-28
影响因子：
3.2
通讯作者：
Jackson, Thomas N.
中科院分区：
文献类型：
--
作者：
Liu, Tianning;Wallace, Margeaux;Jackson, Thomas N.
聚合物衬底上的柔性压电薄膜在传感、致动和能量收集应用中提供了优势。然而，由于结晶所需的高温，许多无机压电材料如Pb（Zr-x，Ti 1-x）O-3（PZT）在聚合物上的直接沉积具有挑战性。介绍了一种PZT薄膜的转移工艺。PZT薄膜首先生长在具有高温能力的衬底上，例如镀铂的硅。在结晶之后，添加聚合物层，并且通过蚀刻掉释放层从高温衬底移除聚合物-PZT组合，然后聚合物层变成衬底。聚酰亚胺上释放的PZT表现出增强的介电响应，由于从刚性基板上移除后，基板夹紧减少。对于Pb（Zr-0.52，Ti-0.48）（0.98）Nb0.02O3薄膜，Si的释放使反射极化从17.5 μ C/cm（2）增加到26 μ C/cm（2）。此外，极化导致释放的膜中的铁弹性/铁电重新排列增加。在1 kHz下，在从Si释放后，测量到平均介电常数为约1160，损耗角正切低于3%。Rayleigh测量进一步证实了在聚合物上释放的PZT膜中减少的衬底约束和增加的畴壁迁移率之间的相关性。出版社：AIP Publishing
Flexible piezoelectric thin films on polymeric substrates provide advantages in sensing, actuating, and energy harvesting applications. However, direct deposition of many inorganic piezoelectric materials such as Pb(Zr-x, Ti1-x) O-3 (PZT) on polymers is challenging due to the high temperature required for crystallization. This paper describes a transfer process for PZT thin films. The PZT films are first grown on a high-temperature capable substrate such as platinum-coated silicon. After crystallization, a polymeric layer is added, and the polymer-PZT combination is removed from the high-temperature substrate by etching away a release layer, with the polymer layer then becoming the substrate. The released PZT on polyimide exhibits enhanced dielectric response due to reduction in substrate clamping after removal from the rigid substrate. For Pb(Zr-0.52, Ti-0.48)(0.98)Nb0.02O3 films, release from Si increased the remanent polarization from 17.5 mu C/cm(2) to 26 mu C/cm(2). In addition, poling led to increased ferroelastic/ferroelectric realignment in the released films. At 1 kHz, the average permittivity was measured to be around 1160 after release from Si with a loss tangent below 3%. Rayleigh measurements further confirmed the correlation between diminished substrate constraint and increased domain wall mobility in the released PZT films on polymers. Published by AIP Publishing.