A new switching device for printed electronics: inkjet-printed microelectromechanical relay.
A new switching device for printed electronics: inkjet-printed microelectromechanical relay.
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一种用于印刷电子的新型开关装置：喷墨印刷微机电继电器。
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
V. Subramanian
中科院分区：
文献类型：
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作者：
Eung Seok Park;Yenhao Chen;T. Liu;V. Subramanian
采用溶液处理材料的印刷电子器件被认为是实现低成本大面积电子系统的关键，但是由于可印刷半导体材料的有限性能，印刷晶体管的性能通常不足以满足大多数预期应用。我们提出了一种印刷开关的替代方法，其中可以通过使用基于印刷金属纳米颗粒的油墨构建机械开关来避免使用半导体。在这项工作中，我们详细介绍了第一次演示的喷墨印刷微机电（MEM）开关具有突变的开关特性，非常低的导通电阻（~10 Ω），和非常低的关断状态泄漏。该器件是使用一种新的工艺方案来制造的，以建立从溶液处理的金属纳米颗粒和牺牲聚合物层的三维悬臂梁结构。因此，这些印刷的MEM开关代表了实现印刷电子器件的独特的有吸引力的路径。
Printed electronics employing solution-processed materials is considered to be the key to realizing low-cost large-area electronic systems, but the performance of printed transistors is generally inadequate for most of the intended applications due to limited performance of printable semiconductor materials. We propose an alternative approach for a printed switch, where the use of semiconductors can be avoided by building mechanical switches with printed metal nanoparticle-based inks. In this work, we detail the first demonstration of inkjet-printed microelectromechanical (MEM) switches with abrupt switching characteristics, very low on-state resistance (~10 Ω), and very low off-state leakage. The devices are fabricated using a novel process scheme to build three-dimensional cantilever structures from solution-processed metallic nanoparticles and sacrificial polymer layers. These printed MEM switches thus represent a uniquely attractive path for realizing printed electronics.