Thin film diamond membranes bonded on-demand with SOI ring resonators
Thin film diamond membranes bonded on-demand with SOI ring resonators
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DOI：
10.1016/j.diamond.2018.07.020
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发表时间：
2018-09-01
影响因子：
4.1
通讯作者：
Strain, Michael J.
中科院分区：
文献类型：
--
作者：
Hill, Paul;Gu, Erdan;Strain, Michael J.
单晶（SC）金刚石膜与片上光学器件的混合集成具有为许多应用提供服务的潜力，涵盖非线性光学到嵌入金刚石色心的量子光子学。然而，高光学质量金刚石的有限尺寸限制了可以在单个芯片上制造的器件的尺寸和数量，这阻碍了金刚石在大型光子集成电路中的使用。在这里，我们展示了1 μ m厚的SC金刚石膜与硅光子器件的制造和集成。使用SEM和光学技术测量金刚石-硅界面的质量。硅microwave谐振器与金刚石膜集成后进行测量，并显示出0.4 dB的低过剩损耗和群折射率色散，这是依赖于在金刚石层中的模式限制。
The hybrid integration of single-crystal (SC) diamond membranes with on-chip optical devices has the potential to service many applications, spanning non-linear optics to quantum photonics with embedded diamond colour centres. Limited dimensions of high optical quality diamond however restrict the size and number of devices that can be fabricated on a single chip, which impedes the use of diamond in large photonic integrated circuitry. Here we show the fabrication and integration of a 1 mu m thick SC diamond membrane with a silicon photonic device. The quality of the diamond-silicon interface is measured using SEM and optical techniques. Silicon microring resonators are measured after integration with the diamond film and show a low excess loss of 0.4 dB and a group index dispersion that is dependent on the mode confinement in the diamond layer.