Combining structural and chemical information at the nanometer scale by correlative transmission electron microscopy and atom probe tomography
Combining structural and chemical information at the nanometer scale by correlative transmission electron microscopy and atom probe tomography
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DOI：
10.1016/j.ultramic.2015.02.003
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发表时间：
2015-06-01
期刊：
影响因子：
2.2
通讯作者：
Raabe, D.
中科院分区：
文献类型：
--
作者：
Herbig, M.;Choi, P.;Raabe, D.
在许多情况下，从原子探针断层扫描（APT）的三维重建是不够准确，以解决晶体学特征，如晶格平面，剪切带，堆垛层错，位错或晶界。因此，除了在样本的完全相同位置进行APT之外，还需要相关的晶体学表征。此外，对于含有感兴趣区域（例如晶界）的APT尖端的特定位点制备，相关电子显微镜检查通常是不可避免的。在这里，我们提出了一个多功能的实验装置，使相关的聚焦离子束铣削，透射电子显微镜（TEM），APT优化表征条件下进行。该装置设计用于高通量、稳健性和实用性。我们证明，原子探针尖端可以通过TEM以与标准TEM样品相同的方式进行表征。特别是，扫描纳米束衍射的使用提供了宝贵的互补晶体学信息时，被执行的原子探针尖端。这种技术能够测量取向和相位图，如从电子背散射衍射已知的，具有低至一纳米的空间分辨率。(C)2015 Elsevier B.V.版权所有。
In many cases, the three-dimensional reconstructions from atom probe tomography (APT) are not sufficiently accurate to resolve crystallographic features such as lattice planes, shear bands, stacking faults, dislocations or grain boundaries. Hence, correlative crystallographic characterization is required in addition to APT at the exact same location of the specimen. Also, for the site-specific preparation of APT tips containing regions of interest (e.g. grain boundaries) correlative electron microscopy is often inevitable. Here we present a versatile experimental setup that enables performing correlative focused ion beam milling, transmission electron microscopy (TEM), and APT under optimized characterization conditions. The setup was designed for high throughput, robustness and practicability. We demonstrate that atom probe tips can be characterized by TEM in the same way as a standard TEM sample. In particular, the use of scanning nanobeam diffraction provides valuable complementary crystallographic information when being performed on atom probe tips. This technique enables the measurement of orientation and phase maps as known from electron backscattering diffraction with a spatial resolution down to one nanmeter. (C) 2015 Elsevier B.V. All rights reserved.