Crystalline Hydrate Dehydration Sensing Based on Integrated Terahertz Whispering Gallery Mode Resonators.

Crystalline Hydrate Dehydration Sensing Based on Integrated Terahertz Whispering Gallery Mode Resonators.
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基于集成太赫兹回音壁模式谐振器的结晶水合物脱水传感

DOI:
10.3390/s22239116
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发表时间:
2022-11-24
期刊:
Sensors (Basel, Switzerland)
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其他
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水分子在水合物的水合和脱水过程中起着非常重要的作用,这可能导致不同的物理和化学性质,影响其在实际应用中的可用性。然而,仍然缺乏能够快速、灵敏地感测水合物中的水分子的小型化、集成传感器,限制了它们的扩散。在这里,我们实现了高灵敏度的五水硫酸铜(CuSO 4·5 H2O)中的水分子的传感,基于片上太赫兹回音壁模式谐振器(THz-WGMR)通过CMOS兼容技术制造在硅材料上。提出并制作了一种高Q值为3305、谐振频率为410.497 GHz的集成太赫兹波巨磁阻(THz-WGMR)。利用该传感器对CuSO_4·xH_2 O(x = 5,3,1)进行了识别。从CuSO 4·5 H2O到三水硫酸铜(CuSO 4·3 H2O)的静态表征发生了0.55 GHz/μmol的蓝移,而从CuSO 4·3 H2O到一水硫酸铜(CuSO 4·H2O)的脱水过程发生了0.21 GHz/μmol的蓝移。最后,对CuSO 4·5 H2O在不同温度下脱水生成CuSO 4·3 H2O的动态过程进行了监测。我们相信,我们提出的具有高灵敏度物质识别能力的THz-WGMR传感器可以为研究物质之间的转化提供一个通用的集成平台,有助于水合/结晶水辅助生化应用。
Water molecules play a very important role in the hydration and dehydration process of hydrates, which may lead to distinct physical and chemical properties, affecting their availability in practical applications. However, miniaturized, integrated sensors capable of the rapid, sensitive sensing of water molecules in the hydrate are still lacking, limiting their proliferation. Here, we realize the high-sensitivity sensing of water molecules in copper sulfate pentahydrate (CuSO4·5H2O), based on an on-chip terahertz whispering gallery mode resonator (THz-WGMR) fabricated on silicon material via CMOS-compatible technologies. An integrated THz-WGMR with a high-Q factor of 3305 and a resonance frequency of 410.497 GHz was proposed and fabricated. Then, the sensor was employed to distinguish the CuSO4·xH2O (x = 5, 3, 1). The static characterization from the CuSO4·5H2O to the copper sulfate trihydrate (CuSO4·3H2O) experienced blueshifts of 0.55 GHz/μmol, whereas the dehydration process of CuSO4·3H2O to copper sulfate monohydrate (CuSO4·H2O) exhibited blueshifts of 0.21 GHz/μmol. Finally, the dynamic dehydration processes of CuSO4·5H2O to CuSO4·3H2O at different temperatures were monitored. We believe that our proposed THz-WGMR sensors with highly sensitive substance identification capabilities can provide a versatile and integrated platform for studying the transformation between substances, contributing to hydrated/crystal water-assisted biochemical applications.
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