Advances in the calibration of atom probe tomographic reconstruction

Advances in the calibration of atom probe tomographic reconstruction
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DOI:
10.1063/1.3068197
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发表时间:
2009-02-01
影响因子:
3.2
通讯作者:
Ringer, Simon P.
Ringer, Simon P.
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Gault, Baptiste;Moody, Michael P.;Ringer, Simon P.

文献摘要

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现代宽视场原子探针允许观察广泛的晶体学特征,其可用于校准分析体积的断层重建。在这项研究中,方法来确定的原子探针数据集的层析重建中所涉及的几何参数的值进行了介绍和讨论。探讨了尖端到电极距离和试样温度对这些参数的影响。值得注意的是,它们的影响被证明是非常有限的,表明一个相对较宽的制度的实验参数空间的声音原子探针层析成像(APT)实验。这些方法已被用于几个标本和材料类型,结果表明,重建参数是特定于每个标本。最后,它示出了如何重建的准确校准,使原子探针的显微镜和微量分析能力的质量和可靠性的改善。
Modern wide field-of-view atom probes permit observation of a wide range of crystallographic features that can be used to calibrate the tomographic reconstruction of the analyzed volume. In this study, methodologies to determine values of the geometric parameters involved in the tomographic reconstruction of atom probe data sets are presented and discussed. The influence of the tip to electrode distance and specimen temperature on these parameters is explored. Significantly, their influence is demonstrated to be very limited, indicating a relatively wide regime of experimental parameters space for sound atom probe tomography (APT) experiments. These methods have been used on several specimens and material types, and the results indicate that the reconstruction parameters are specific to each specimen. Finally, it is shown how an accurate calibration of the reconstruction enables improvements to the quality and reliability of the microscopy and microanalysis capabilities of the atom probe.