Recent Advances In Interferometry At Zygo
Recent Advances In Interferometry At Zygo
复制标题
Zygo 干涉测量的最新进展
DOI：
10.1117/12.941758
复制
发表时间：
1987
期刊：
影响因子：
--
通讯作者：
B. Truax
中科院分区：
文献类型：
--
作者：
R. Smythe;J. Soobitsky;B. Truax
本文将讨论Zygo在干涉测量领域取得的一些最新进展。在过去的一年里，Zygo在干涉测量领域推出了五大进展：5500外差轮廓仪、AXIOM 2/20距离测量干涉仪、用于大口径相位干涉测量的450 mm相位调制器、351nrn的相位测量干涉仪和Mark IV可编程相位测量干涉仪。演讲结束时，将对Zygo对干涉测量学未来的看法进行一般性讨论。
This paper will discuss some of the recent advances in the field of interferometry that have been made at Zygo. In the past year Zygo has introduced five major advances in the interferometry field: the 5500 Heterodyne Profiler, the AXIOM 2/20 distance measuring interferometer, a 450mm phase modulator for large aperture phase interferometry, a phase measuring interferometer at 351nrn and the Mark IV programmable phase measuring interferometer. The presentation will conclude with a general discussion of what Zygo sees for the future of interferometry.