Generation of rotationally symmetric surfaces by infeed grinding with a rotary table and a cup wheel
Generation of rotationally symmetric surfaces by infeed grinding with a rotary table and a cup wheel
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DOI：
10.1016/j.precisioneng.2012.09.007
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发表时间：
2013-04
影响因子：
3.6
通讯作者：
F. Huo;D. Guo;Zhe Li;G. Feng;R. Kang
中科院分区：
文献类型：
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作者：
F. Huo;D. Guo;Zhe Li;G. Feng;R. Kang
在用转盘和杯形砂轮进行切入磨削时，可以主动选择砂轮半径、转盘与杯形砂轮之间的中心距、砂轮倾角和转盘方向角。这使得它能够以成本有效的方式生成具有高精度、高表面光洁度和高表面完整性的旋转对称表面形状的丰富系列。然而，其应用长期以来仅限于硅晶片的平整和薄化。在这项研究中，旋转对称的表面生成的理论基础，这种磨削方法的发展。分析了展成曲线可能的形状类型以及机床结构参数对其形状特征的影响。结果表明，该方法除可生成平面外，还可生成直锥面、凸锥面、凹锥面、凸对凹锥面、凹对凸锥面、凸对凹对凸锥面、凹对凸锥面。
In infeed grinding with a rotary table and a cup wheel, the wheel radius, the center distance between the rotary table and the cup wheel, the wheel inclination angle and the rotary table direction angle can be actively chosen. This makes it capable of generating a rich family of rotationally symmetric surface shapes with high accuracy, high surface finish and high surface integrity in a cost effective way. However, its application has long been confined to silicon wafers flattening and thinning. In this study, the theoretical basis for the rotationally symmetric surface generation by this grinding method was developed. The possible shape types of the generating curves and the substantial influence of the machine configuration parameters on their shape characteristics were analyzed. It was found that, besides flat surface, it can be used to generate straight conical surface, convex conical surface, concave conical surface, convex to concave conical surface, concave to convex conical surface, convex to concave to convex conical surface and concave to convex to concave conical surface.