Ion implantation into inner wall surface of millimeter size diameter steel tube by plasma source ion implantation
Ion implantation into inner wall surface of millimeter size diameter steel tube by plasma source ion implantation
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DOI：
10.1016/s0257-8972(02)00284-0
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发表时间：
2002-09
影响因子：
5.4
通讯作者：
K. Baba;R. Hatada
中科院分区：
文献类型：
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作者：
K. Baba;R. Hatada
采用等离子体源离子注入(PSII)技术，对内径分别为0.9 mm、2 mm和1.6 mm的304奥氏体型不锈钢和镍管的内壁表面进行了氮离子和碳离子注入。这些30 mm长的衬底管固定在真空室中的氧化铝陶瓷管上，充入氮气和乙炔气体。向氧化铝陶瓷管中的天线提供2.45 GHz微波，并在该管中通过同轴电子回旋共振(ECR)放电产生等离子体。向钢管和镍管施加15KV(1 kHz10μS)的负高压脉冲，从产生的等离子体中提取离子。用俄歇电子能谱和拉曼光谱对注入表面的成分和结构进行了表征。结果表明，PSII能实现均匀的氮离子注入到金属管内壁的毫米级表面。经乙炔PSII处理的内壁表面证实了碳注入和随后的类金刚石(DLC)涂层。
Nitrogen and carbon ions were implanted into the inner wall surface of 304 austenitic type stainless steel and Ni tubes with inner diameters of 0.9, 2 and 1.6 mm, by a plasma source ion implantation (PSII). These 30 mm long substrate tubes were fixed to an alumina ceramic tube in a vacuum chamber, fed with nitrogen and acetylene gases. A 2.45 GHz microwave was supplied to an antenna in the alumina ceramic tube and plasma was produced by a coaxial electron cyclotron resonance (ECR) discharge in this tube. A negative high voltage pulse of 15 kV (1 kHz, 10 μs) was applied to the steel and Ni tubes to extract ions from the generated plasma. The compositional and structural characterizations of the implanted surfaces were carried out using Auger electron spectroscopy and Raman spectroscopy. The results showed that uniform nitrogen ion implantation into the millimeter size inner wall surface of metal tubes was achieved by the PSII. Carbon implantation and subsequent diamond like carbon (DLC) coating was confirmed for the inner wall surface treated by acetylene PSII.