High rate deposition of thick YBa2Cu3O7−x superconducting films using low-fluorine solution
High rate deposition of thick YBa2Cu3O7−x superconducting films using low-fluorine solution
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DOI：
10.1088/0953-2048/20/3/024
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发表时间：
2007-03
影响因子：
3.6
通讯作者：
Yuanqing Chen;Gaoyang Zhao;L. Lei;Xiaomei Liu
中科院分区：
文献类型：
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作者：
Yuanqing Chen;Gaoyang Zhao;L. Lei;Xiaomei Liu
我们开发了一种用于制造 YBa2Cu3O7−x (YBCO) 薄膜的新解决方案。这种新溶液的氟含量仅为全TFA溶液的30%，并且热处理周期的持续时间比使用传统全TFA溶液时要短得多。在 10 °C min−1 的高加热速率下可以获得具有镜面表面的热解薄膜。因此，可以使用多重涂层-热解工艺快速制备厚的YBCO薄膜。使用低氟溶液，在热解过程中形成Y和Ba氟化物（YF3和BaF2），这与使用全TFA溶液时相同。因此，在YBCO成核之前形成了液相，这增强了YBCO薄膜的外延生长及其超导性能。
We have developed a new solution for fabrication of YBa2Cu3O7−x (YBCO) films. This new solution contains only 30% of the fluorine content in an all-TFA solution, and the duration of the heat-treatment cycles is much shorter than that when the traditional all-TFA solution is used. Pyrolyzed films with mirror-like surfaces can be obtained at a high heating rate of 10 °C min−1. Therefore, thick YBCO films can be prepared rapidly using a multiple coating–pyrolysis process. Using low-fluorine solution, Y and Ba fluorides (YF3 and BaF2) were formed during the pyrolysis process, which is the same as when an all-TFA solution was used. Hence, a liquid phase was formed prior to the YBCO nucleation, which enhanced the epitaxial growth of the YBCO film as well as its superconducting performance.