The effects of film surface roughness on x-ray diffraction of nonpolar gallium nitride films
The effects of film surface roughness on x-ray diffraction of nonpolar gallium nitride films
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DOI：
10.1088/0022-3727/42/13/135407
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发表时间：
2009-07-07
影响因子：
3.4
通讯作者：
Humphreys, C. J.
中科院分区：
文献类型：
--
作者：
Moram, M. A.;Johnston, C. F.;Humphreys, C. J.
发现薄膜表面形貌的差异与非极性GaN薄膜的x射线衍射数据的差异有关。不规则表面的局部应变松弛可以产生晶格平面弯曲，导致表面特异性ω -扫描变宽，因此与浅x射线穿透深度相关的反射峰宽度异常宽。与表面粗糙度相关的影响也有助于观察到的旋转-扫描宽度各向异性。Williamson-Hall图可用于估计表面粗糙度效应对总体ω -扫描增宽的贡献程度。
Differences in film surface morphology are found to relate to differences in x-ray diffraction data from nonpolar GaN films. Local strain relaxation at an irregular surface can produce lattice plane bending, leading to surface-specific omega-scan broadening and hence abnormally broad peak widths from reflections associated with shallow x-ray penetration depths. Effects related to surface roughness also contribute to the observed rotational omega-scan width anisotropy. Williamson-Hall plots can be used to estimate to what degree surface roughness effects contribute to the overall omega-scan broadening.