Fabrication and characterization of a new planar solid-state reference electrode for ISFET sensors
Fabrication and characterization of a new planar solid-state reference electrode for ISFET sensors
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DOI：
10.1016/s0040-6090(01)01783-7
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发表时间：
2002-03-01
期刊：
影响因子：
2.1
通讯作者：
Huang, RS
中科院分区：
文献类型：
--
作者：
Huang, IY;Huang, RS
报道了一种用于ISFET传感器的平面固态参考电极的制备方法。琼脂糖粉末被引入到KC1饱和电解质凝胶中，作为聚合物稳定的内电解质和Ti/Pd/Ag/AgC1平面电极的离子扩散膜。它可以将参考电极集成到传感器芯片上，例如用于离子传感测量的ISFET。这种新型的平面集成参比电极不仅消除了将内部参比液体电解质填充到微型微机械腔中的制造问题，而且在参比电位稳定性和对pH值和C1（-）离子变化的不敏感性方面具有许多优异的性能特征。被测样品溶液中的浓度。与标准Ag/AgC1参比电极比对，新型平面参比电极在30 min内的电池电位变化小于1 mV；pH值范围从4到10，变化小于2 mV；几乎麻木不仁。0.02类似于0.25 mV/pKC1)对C1（-）离子浓度变化的影响。参考电极也显示出0.45 mV的非常小的失调电压，并且在批量制造的电极之间可重复到0.5 mV以内。(C) 2002 Elsevier Science B.V.版权所有
A now technique to fabricate planar solid-state reference electrodes for ISFET sensors is reported. Agarose powder was introduced to gel the KC1 saturated electrolyte to serve both as a polymer-stabilized internal electrolyte and an ion-diffusion membrane for Ti/Pd/Ag/AgC1 planar electrode. It enables the integration of a reference electrode on the sensor chip such as ISFET for ion sensing measurement. This new planar integrated reference electrode has not only eliminated the fabrication problems associated with the filling of the inner reference liquid electrolyte into a miniature micromachined cavity, but also has many excellent performance characteristics with respect to the reference potential stability and its insensitivity to the changes of pH values and C1(-) ion. concentrations in the sample solutions under test. Calibrated against the standard Ag/AgC1 reference electrode the new planar reference electrode shows its cell potential variation less than 1 mV over 30 min; less than 2 mV variation over pH values ranging from 4 to 10; and almost insensitive (approx. 0.02 similar to 0.25 mV/pKC1) to changes in C1(-) ion concentration. The reference electrode also shows a very small offset voltage of 0.45 mV and reproducible to within 0.5 mV among the batch fabricated electrodes. (C) 2002 Elsevier Science B.V. All rights reserved.