Development of Low Fluorescence Thick Photoresist for High Aspect Ratio Microstructures in Bio Application
Development of Low Fluorescence Thick Photoresist for High Aspect Ratio Microstructures in Bio Application
复制标题
生物应用中高深宽比微结构低荧光厚光刻胶的开发
DOI:
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发表时间:
2014
期刊:
影响因子:
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通讯作者:
H. Kotera and T. Suzuki
中科院分区:
文献类型:
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作者:
H. Tamai;K. Maruo;H. Kotera and T. Suzuki