T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications
T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications
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DOI：
10.1109/lpt.2015.2432124
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发表时间：
2015-08
影响因子：
2.6
通讯作者：
Jijun Feng;R. Akimoto
中科院分区：
文献类型：
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作者：
Jijun Feng;R. Akimoto
实验研究了一种位于二氧化硅基座上的T型氮化硅环形谐振腔。与未悬挂的设备相比，它允许与周围环境的增强交互，同时保持高品质因数。谐振腔由波导宽度为1.3 μm的定向耦合器和弯曲半径为20 μm的环形结构组成。在1550.4nm波长处，品质因数大于1.6 × 104，消光比约为9.2dB，自由光谱范围为5.48nm。测得的器件灵敏度为~247 nm/RIU。该器件具有广阔的光学传感应用前景。
A T-shape suspended silicon nitride racetrack ring resonator sitting on a silicon dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction with the surrounded environment while maintaining a high quality factor. The resonator consists of a directional coupler with a waveguide width of 1.3 μm and a ring structure with curve radius of 20 μm. More than 1.6 × 104 quality factor at a wavelength of 1550.4 nm can be obtained, with a moderate extinction ratio of ~9.2 dB and a free-spectral range of 5.48 nm. The measured device sensitivity is ~247 nm/RIU. The device is expected to have a wide optical sensing application prospect.