Amplitude control of the cantilever of the transverse dynamic force microscope
Amplitude control of the cantilever of the transverse dynamic force microscope
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DOI：
10.1109/isic.2015.7307292
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发表时间：
2015-10
期刊：
影响因子：
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通讯作者：
Thang Nguyen;C. Edwards;G. Herrmann;T. Hatano;S. Burgess;M. Miles
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文献类型：
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作者：
Thang Nguyen;C. Edwards;G. Herrmann;T. Hatano;S. Burgess;M. Miles
本文研究了横向动态力显微镜（TDFM）悬臂梁的振幅控制问题。悬臂梁的动力学最初被呈现为一个偏微分方程，随后由一个有限维模型近似。影响悬臂梁振幅的未知剪切力参数由自适应方法估计。提出了一种利用悬臂梁剪切力模型的参数估计来调节悬臂梁振幅的控制器。这是通过一个自适应的内部模型为基础的前馈方法，使用一种新的估计方案，以创建一个整体的前馈模型与单位增益。为了对抗悬臂梁的模型不确定性的影响，反馈方案感测期望的单位增益模型与实际悬臂梁尖端位置之间的差异，并动态地反馈该误差。数值仿真结果验证了该方法的有效性。
In this paper, the problem of amplitude control of the cantilever in a Transverse Dynamic Force Microscope (TDFM) is considered. The dynamics of the cantilever are initially presented as a partial differential equation which is subsequently approximated by a finite dimensional model. The unknown shear force parameters which affect the amplitude of the cantilever are estimated by an adaptive scheme. A controller which utilizes the parameter estimates of the cantilever shear force model is proposed to regulate the amplitude of the cantilever. This is achieved by an adaptive internal model based feedforward approach using a novel estimation scheme, to create an overall feedforward model with unity gain. To counter the effect of model uncertainty of the cantilever, a feedback scheme senses the difference between the expected unity gain model and the actual cantilever tip position, and feeds back this error dynamically. Numerical simulations are presented to illustrate the effectiveness of the method.