Novel micromachined cantilever sensors for scanning near‐field optical microscopy
Novel micromachined cantilever sensors for scanning near‐field optical microscopy
复制标题
用于扫描近场光学显微镜的新型微机械悬臂传感器
DOI：
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
E. Oesterschulze
中科院分区：
文献类型：
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作者：
S. Münster;S. Werner;C. Mihalcea;W. Scholz;E. Oesterschulze
描述了在Si微杠杆上可重复地微加工中空金属尖端及其在扫描近场光学显微镜（SNOM）中的适用性。该传感器采用半导体兼容技术制造。一个中空的金属金字塔被用作SNOM的光学孔径传感器，同时作为扫描力显微镜应用的力传感器。实现了低至120 nm的衍射。为了证实传感器的可行性，我们提出了微结构铬膜以及热灯丝化学气相沉积生长（111）金刚石膜的测量。SNOM图像显示约100 nm的分辨率，证明了这些探针的有用性。
The reproducible micromachining of hollow metal tips on Si cantilevers and their applicability to scanning near‐field optical microscopy (SNOM) is described. This sensor is fabricated using semiconductor compatible technologies. A hollow metal pyramid is employed as an optical aperture sensor for SNOM and simultaneously as a force sensor for scanning force microscopy applications. Apertures down to 120 nm were realized. To confirm the feasibility of the sensor we present measurements on microstructured chromium films as well as on hot filament chemical vapour deposition grown (111) diamond membranes. The SNOM images show a resolution of about 100 nm, demonstrating the usefulness of these probes.