Near-threshold photoablation characteristics of polyimide and poly(ethylene terephthalate)
Near-threshold photoablation characteristics of polyimide and poly(ethylene terephthalate)
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聚酰亚胺和聚对苯二甲酸乙二醇酯的近阈值光烧蚀特性
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发表时间：
1997
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通讯作者：
D. Krajnovich
中科院分区：
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作者：
D. Krajnovich
使用248 nm、16 ns准分子激光脉冲在真空中研究聚酰亚胺（Dupont Kapton™）和聚（对苯二甲酸乙二醇酯）（PET）（Dupont Mylar™）的光烧蚀。使用灵敏的电子束电离器/四极质谱仪检测器来测量在非常接近阈值（平均材料去除率<100 A/脉冲）的注量下中性光产物的质量、平移能和角分布。通过组合来自许多离散样品点的结果来执行实验，以最小化由累积脉冲（“辐射硬化”）引起的产量、能量和表面形貌的变化。对于聚酰亚胺和PET，占主导地位的中性光产物是单体的片段，虽然有一个弱尾强度延伸到1000 amu以上。平均平移能量随着质量的增加而增加，这是由于碰撞的“种子束”效应。大多数物质的平均平移能（即，200 amu以下的）约为1.6-4.9 e.
Photoablation of polyimide (Dupont Kapton™) and poly(ethylene terephthalate) (PET) (Dupont Mylar™) were studied in vacuum using 248 nm, 16 ns excimer laser pulses. A sensitive electron beam ionizer/quadrupole mass spectrometer detector was used to measure mass, translational energy, and angular distributions of the neutral photoproducts at fluences very close to the threshold (average material removal rates <100 A/pulse). The experiments were performed by combining results from many discrete sample spots, in order to minimize the changes in yield, energy, and surface topography caused by cumulative pulsing (“radiation hardening”). For both polyimide and PET, the dominant neutral photoproducts are fragments of the monomer, although there is a weak tail of intensity extending up to and beyond 1000 amu. The mean translational energy increases with increasing mass, due to the collisional “seeded beam” effect. The mean translational energy of the majority species (i.e., those below 200 amu) is around 1.6–4.9 e...