Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations
Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations
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DOI：
10.1088/1748-3182/7/4/046009
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发表时间：
2012-12-01
影响因子：
3.4
通讯作者：
Krijnen, G. J. M.
中科院分区：
文献类型：
--
作者：
Dagamseh, A. M. K.;Wiegerink, R. J.;Krijnen, G. J. M.
流量传感器阵列揭示了测量时空流动模式的潜力，而不是仅仅在一个点上的流量测量。本文介绍了仿生流量传感器阵列的设计，制造和接口的发展，灵感来自蟋蟀的流量敏感器官（cerci）。为了利用我们的人造毛发流量传感器阵列实现高分辨率流场可视化，讨论并比较了各种阵列接口方案。频分复用（FDM）被证明是一种有吸引力的方法，用于电容阵列传感器的高效询问。采用深沟槽隔离结构的绝缘体上硅技术，已经成功地制造了具有差分电容读出的毛发基流量传感器，该传感器布置在单芯片阵列中。FDM被实现并用于询问个体毛发传感器，从而提供来自多根毛发的同时实时流量测量。这种强大的方法是通过重建的谐波偶极子场的头发的位置，并通过定位此偶极子源相对于阵列元件的字段。
Flow-sensor arrays uncover the potential to measure spatio-temporal flow patterns rather than flow measurements at just a single point. We present in this paper the developments in design, fabrication and interfacing of biomimetic flow-sensor arrays, inspired by flow-sensitive organs (cerci) of crickets. For the purpose of high-resolution flow field visualization by our artificial hair flow-sensor arrays, various array-interfacing schemes are discussed and compared. Frequency division multiplexing (FDM) is shown to be an attractive method for efficient interrogation of capacitive array sensors. Using silicon-on-insulator technology with deep trench isolation structures, hair-based flow-sensors with differential capacitive read-out, arranged in single-chip arrays, have been successfully fabricated. FDM is implemented and used to interrogate individual hair sensors providing simultaneous real-time flow measurements from multiple hairs. This powerful approach is demonstrated by reconstruction of the field of a harmonic dipole field at the position of the hairs and by localizing this dipole source relative to the array elements.