Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications
Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications
复制标题
时间成形飞秒激光脉冲作为纳米光子应用中介电材料的直接图案化方法
DOI：
10.1117/12.2051749
复制
发表时间：
2014
期刊：
影响因子：
--
通讯作者：
H. Hillmer
中科院分区：
文献类型：
--
作者：
T. Meinl;N. Götte;Y. Khan;T. Kusserow;C. Sarpe;J. Köhler;M. Wollenhaupt;A. Senftleben;T. Baumert;H. Hillmer
提出了一种利用瞬时成形飞秒激光脉冲对介质材料进行直接图像化的方法。研究了具有二维周期图案的圆形基元光子晶体薄膜波导。我们使用电介质，因为它们是透明的，特别是在可见光谱范围内，但也在紫外线和近红外范围内。因此，它们非常适合作为光学滤光片在相同的光谱区域。由于非导电介质材料的结构受到电荷的影响，采用激光加工作为图像化方法来代替传统的加工技术，如电子束光刻或聚焦离子束是一个非常有吸引力的选择。尽管折射率对比度较低，但我们通过数值结果表明，周期性耦合平面的正常入射光可以激发范诺共振。这使得该设备作为窄带滤光片非常有趣。光学滤光片在可见光和紫外波段的应用需要在亚100nm范围内制造光子晶体结构。时间形飞秒激光脉冲作为一种高精度激光加工宽禁带材料以制造介电介质中光子晶体结构的新方法。塑造时间不对称脉冲序列使生产结构远远低于衍射极限。我们将这一过程与高折射率层的沉积相结合，以实现目标谐振波导结构。此外，我们关注激光加工产生的边缘形成，因为这是制造具有小晶格常数的光子晶体阵列的重要问题。
We present a direct patterning method of dielectric materials via temporally shaped femtosecond laser pulses. A thinfilm waveguide with a 2D periodic pattern of photonic crystals with circular base elements is investigated. We use dielectrics since they are transparent especially in the visible spectral range, but also in UV and near infrared range. Thus, they are very suitable as optical filters in the very same spectral region. Since structuring of non-conductive dielectric materials suffers from charging, the implementation of laser processing as patterning method instead of conventional processing techniques like electron beam lithography or focused ion beams is a very attractive alternative. Despite a low refractive index contrast, we show by numerical results that normal incident of light to the plane of periodicity couples to a waveguide mode and can excite Fano resonances. That makes the device extremely interesting as narrow-band optical filter. Applications of optical filters in the visible and UV range require fabrication of photonic crystal structures in the sub-100 nm range. Temporally shaped femtosecond laser pulses are applied as a novel method for very high precision laser processing of wide band gap materials to create photonic crystal structures in dielectrics. Shaping temporally asymmetric pulse trains enable the production of structures well below the diffraction limit.1We combine this process with deposition of a high refractive index layer to achieve the targeted resonant waveguide structure. Additionally, we focus on the rim formation arising by laser processing since this is an important issue for fabrication of photonic crystal arrays with small lattice constants.
登录
查看更多内容
光子晶体板中导模谐振的实验品质因数测定
影响因子：
4
作者：
Y. Nazirizadeh;U. Lemmer;M. Gerken
通讯作者：
M. Gerken
影响因子：
3.8
作者：
Koehler, Jens;Wollenhaupt, Matthias;Baumert, Thomas
通讯作者：
Baumert, Thomas
影响因子：
6.3
作者：
Oskooi, Ardavan F.;Roundy, David;Johnson, Steven G.
通讯作者：
Johnson, Steven G.
作为可调谐光学 MEMS 器件偏振结构的光子晶体的光学特性
DOI：
10.1109/omems.2011.6031069
发表时间：
2011
期刊：
16th International Conference on Optical MEMS and Nanophotonics
影响因子：
--
作者：
R. Zamora;M. Benés;T. Kusserow;H. Hillmer;U. Akcakoca;B. Witzigmann
通讯作者：
B. Witzigmann