Nanocrystalline porous silicon ultrasonic transmitter with patterned emission area
Nanocrystalline porous silicon ultrasonic transmitter with patterned emission area
复制标题
具有图案化发射区域的纳米晶多孔硅超声波发射器
DOI：
10.1109/memsys.2007.4433011
复制
发表时间：
2007
期刊：
影响因子：
--
通讯作者：
I. Shimoyama
中科院分区：
文献类型：
--
作者：
A. Isozaki;A. Nakai;K. Matsumoto;I. Shimoyama
我们提出了一种纳米晶多孔硅（nc-PS）超声波发射器与可变方向图。通过使用干涉效应来实现定向图案。根据所施加的电流从nc-PS层上的电极发射超声波。发射器的发射区域被图案化，以便利用发射的超声波之间的干涉。为了观察干涉效应，我们的设备被设计为具有两个发射区域。由干涉效应引起的方向图取决于发射区域之间的距离以及施加到发射区域的电流的频率和相位差。我们证实了方向图的清晰度和波瓣数可以通过两个发射区域之间的相位差来改变。我们还证实了主瓣的方向可以通过相位差来改变。该器件具有方向图可设计、可控的特点，适用于距离传感器，特别是接近传感器。
We propose a nanocrystalline porous silicon (nc-PS) ultrasonic transmitter with a variable directional pattern. The directional pattern is realized by using an interference effect. An ultrasonic wave is emitted from electrodes on the nc-PS layer according to the applied electrical current. The emission areas of the transmitter were patterned in order to use the interference between the emitted ultrasonic waves. To observe the interference effect, our device was designed to have two emission areas. The directional pattern induced by the interference effect depends on the distance between the emission areas, and the frequency and the phase difference of the currents applied to the emission areas. We confirmed that the sharpness and the lobe number of the directional pattern can be changed by the phase difference between two emission areas. We also confirmed that the direction of the main lobe can be changed by the phase difference. With the characteristics of the designable and controllable directional pattern, the proposed device is suitable for distance sensors, especially for proximity sensors.
影响因子：
64.8
作者：
Shinoda, H;Nakajima, T;Koshida, N
通讯作者：
Koshida, N