Rapid microfabrication of helical structures for industrial applications
Rapid microfabrication of helical structures for industrial applications
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DOI：
10.1117/12.2608940
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发表时间：
2022-03
期刊：
影响因子：
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通讯作者：
He Cheng;Pooria Golvari;Chun Xia;Mingman Sun;Meng Zhang;S. Kuebler;Xiaoming Yu
中科院分区：
文献类型：
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作者：
He Cheng;Pooria Golvari;Chun Xia;Mingman Sun;Meng Zhang;S. Kuebler;Xiaoming Yu
螺旋结构具有新颖的光学和机械性能，通常用于不同的领域，如超材料和微流体。存在用于制造螺旋微结构的几种方法，但是它们中没有一种具有图案化具有可调节距的大表面区域所需的生产量或灵活性。本文报道了一种基于多光子聚合（MPP）技术，利用单次曝光、三维结构、自加速、轴向可调光场制备高通量、形状可调螺旋结构的方法。的光场产生的高阶贝塞尔模式的叠加，并有一个封闭的形式的表达式相关的相位掩模的设计的光束的旋转速率。该方法被用来制造不同的螺距和旋向的材料SU-8的螺旋。该系统可实现分束和振镜扫描。螺旋矩阵的制造证明。与逐点扫描相比，我们的方法将制造速度提高了两个数量级，为在许多工业应用中采用MPP大规模生产功能器件铺平了道路。
Helical structures exhibit novel optical and mechanical properties and are commonly used in different fields such as metamaterials and microfluidics. A few methods exist for fabricating helical microstructures, but none of them has the throughput or flexibility required for patterning large surface areas with tunable pitch. In this paper, we report a method for fabricating helical structures with high-throughput and adjustable form based on multiphoton polymerization (MPP) using single-exposure, three-dimensionally structured, self-accelerating, axially tunable light-fields. The light-fields are generated as a superposition of high-order Bessel modes and have a closed-form expression relating the design of the phase mask to the rotation rate of the beam. The method is used to fabricate helices with different pitches and handedness in the material SU-8. Beam splitting and galvo-scanning can be implemented in the system. The fabrication of helical matrices is demonstrated. Compared to point-by-point scanning, our method increases the fabrication speed by two orders of magnitude, paving the way for adopting MPP for mass production of functional devices in many industrial applications.