Phase retrieval for optical inspection of technical components
Phase retrieval for optical inspection of technical components
复制标题
用于技术组件光学检测的相位检索
DOI：
10.1088/2040-8978/14/6/065701
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发表时间：
2012
影响因子：
2.1
通讯作者：
Bergmann
中科院分区：
文献类型：
--
作者：
Falldorf;v. Kopylow;Bergmann
我们演示了光学检测的技术组件下的热负荷通过相位恢复。该方案是基于确定的相位分布的光散射的对象使用相位检索从一组强度测量。与现有的配置相比，所采用的设置能够快速获取所需的强度分布，因此在随后的评估过程中可以容忍热负荷期间物体表面的缓慢变化。所提出的系统展示了基于相移干涉测量的检测系统的所有特性，但它不需要参考波，这使得它对环境干扰更宽容，因此是未来工业应用的优选选择。
We demonstrate optical inspection of a technical component under thermal load by means of phase retrieval. The scheme is based on the determination of the phase distribution of light scattered by an object using phase retrieval from a set of intensity measurements. In contrast to already existing configurations, the employed setup enables a rapid acquisition of the required intensity distributions, thus the slow changes of the object's surface during the thermal loading can be tolerated in the subsequent evaluation process. The presented system exhibits all the properties of an inspection system based on phase shifting interferometry, yet it does not require a reference wave, which makes it more tolerant against environmental disturbances and therefore a preferred choice for future industrial applications.