Development of 2D Microdisplay Using an Integrated Microresonating Waveguide Scanning System.
Development of 2D Microdisplay Using an Integrated Microresonating Waveguide Scanning System.
复制标题
DOI：
10.1177/1045389x11409603
复制
发表时间：
2011-09
影响因子：
2.7
通讯作者：
Shih WP
中科院分区：
文献类型：
--
作者：
Hua WS;Wang WC;Wu WJ;Tsui CL;Cui W;Shih WP
我们的研究团队已经开发出一种2D微图像显示设备，该设备可以克服尺寸缩小的限制，同时保持基于镜面的显示系统所获得的高图像分辨率和视场。光学扫描器的基本设计包括一个微加工SU-8悬臂波导，该波导由压电致动器机电偏转。从悬臂波导的远端发射光束，并且传播方向沿沿着两个正交方向移位。使用现场可编程门阵列生成和控制用于致动器和LED光调制的波形。我们最近的研究是对先前报道的机械扫描仪的更新，用微加工系统代替手工制作的PZT扫描仪和光纤波导，该微加工系统将气溶胶沉积的PZT薄膜和聚合物SU-8波导结合在一起。在本文中，我们报告了小型化2D扫描仪原型的设计和制造，讨论了系统特性的光学和机械建模，并给出了实验结果。
Our research team has developed a 2D micro image display device that can potentially overcome the size reduction limits while maintaining the high-image resolution and field of view obtained by mirror-based display systems. The basic design of the optical scanner includes a microfabricated SU-8 cantilever waveguide that is electromechanically deflected by a piezoelectric actuator. From the distal tip of the cantilever waveguide, a light beam is emitted and the direction of propagation is displaced along two orthogonal directions. The waveforms for the actuator and the LED light modulation are generated and controlled using a field programmable gate array. Our recent study is an update to the previously-reported mechanical scanner, replacing the hand-built PZT scanner and fiber waveguide with a microfabricated system incorporating aerosol-deposited PZT thin film and a polymeric SU-8 wave guide. In this article, we report on the design and fabrication of a prototype miniaturized 2D scanner, discuss optical and mechanical the modeling of the system’s properties and present the experimental results.