The effect of UV and thermally induced oxidation on the surface and structural properties of CVD diamond layers with different grain sizes

The effect of UV and thermally induced oxidation on the surface and structural properties of CVD diamond layers with different grain sizes
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紫外和热诱导氧化对不同晶粒尺寸 CVD 金刚石层表面和结构性能的影响

DOI:
10.1016/j.diamond.2021.108739
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发表时间:
2021
影响因子:
4.1
通讯作者:
M. Szybowicz
M. Szybowicz
中科院分区:
材料科学2区
文献类型:
--
作者:
Anna Dychalska;M. Trzcinski;K. Fabisiak;K. Paprocki;W. Koczorowski;S. Łoś;M. Szybowicz

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