Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range
Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range
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DOI：
10.1364/oe.24.009501
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发表时间：
2016-05-02
期刊：
影响因子：
3.8
通讯作者：
Yu, Miao
中科院分区：
文献类型：
--
作者：
Kim, Hyun-Tae;Yu, Miao
我们报告了一个级联环形谐振器（CRR）的基础上，硅光子温度传感器同时提高灵敏度和范围。为了实现双重增强，建议CRR温度传感器采用两个微环谐振器具有不同的温度灵敏度和不同的自由光谱范围（FSR）。温度灵敏度和FSR的差异是通过调整两个环形谐振器的面内几何参数获得的。CRR温度传感器的制作采用单掩模互补金属氧化物半导体（CMOS）兼容工艺。实验结果表明，温度灵敏度为293.9 pm/摄氏度，这是6.3倍，高于一个单独的环形谐振器。该传感器还显示出将温度传感范围提高了5.3倍。(C)2016美国光学学会
We report a cascaded ring resonator (CRR) based, silicon photonic temperature sensor for simultaneous sensitivity and range enhancement. To achieve the dual enhancement, the proposed CRR temperature sensor employs two micro ring resonators with different temperature sensitivities and different free spectral ranges (FSRs). The differences in the temperature sensitivities and FSRs are obtained by tailoring the in-plane geometric parameters of the two ring resonators. The CRR temperature sensor was fabricated by using a single-mask complementary metal-oxide-semiconductor (CMOS)-compatible process. The experimental results demonstrated a temperature sensitivity of 293.9 pm/degrees C, which was 6.3 times higher than that of an individual ring resonator. The sensor was also shown to enhance the temperature sensing range by 5.3 times. (C) 2016 Optical Society of America