Mass spectrometric detection of neutral radicals in a CH4 microwave discharge by use of Li+ ion attachment techniques
Mass spectrometric detection of neutral radicals in a CH4 microwave discharge by use of Li+ ion attachment techniques
复制标题
使用锂离子附着技术对 CH4 微波放电中的中性自由基进行质谱检测
DOI:
10.1063/1.354616
复制
发表时间:
1993
影响因子:
3.2
通讯作者:
Ken‐ichi Syouji
中科院分区:
文献类型:
--
作者:
T. Fujii;Ken‐ichi Syouji
The chemical species of the neutral radicals in the methane microwave (MW) discharge plasma were studied by quadrupole mass spectrometry in combination with a Li+ ion attachment technique. The approach is to have a MW discharge flow pass a lithium ion emitter and then to analyze, by quadrupole mass spectrometry, all ions formed by lithium ion attachment. Mainly, radicals such as CnH2n+1 (n=2–11) and CnH2n−1 (n=2–11) were detected. Species such as C4H3, C5H5, and C6H5 may also be produced in the process. Many such species have been identified for the first time. The presence of these species is evaluated by comparison with results from optical spectroscopy and threshold ionization mass spectrometry.