Mass spectrometric detection of neutral radicals in a CH4 microwave discharge by use of Li+ ion attachment techniques

Mass spectrometric detection of neutral radicals in a CH4 microwave discharge by use of Li+ ion attachment techniques
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使用锂离子附着技术对 CH4 微波放电中的中性自由基进行质谱检测

DOI:
10.1063/1.354616
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发表时间:
1993
影响因子:
3.2
通讯作者:
Ken‐ichi Syouji
Ken‐ichi Syouji
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
T. Fujii;Ken‐ichi Syouji

文献摘要

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采用四极杆质谱联用Li+离子吸附技术研究了甲烷微波放电等离子体中中性自由基的化学形态。方法是让毫瓦的放电流通过锂离子发射器,然后通过四极杆质谱法分析所有由锂离子附着形成的离子。主要检测到CnH2n+1 (n= 2-11)和CnH2n−1 (n= 2-11)等自由基。在此过程中也可能产生C4H3、C5H5和C6H5等物质。许多这样的物种是第一次被发现。这些物质的存在通过与光谱学和阈值电离质谱分析结果的比较来评价。
The chemical species of the neutral radicals in the methane microwave (MW) discharge plasma were studied by quadrupole mass spectrometry in combination with a Li+ ion attachment technique. The approach is to have a MW discharge flow pass a lithium ion emitter and then to analyze, by quadrupole mass spectrometry, all ions formed by lithium ion attachment. Mainly, radicals such as CnH2n+1 (n=2–11) and CnH2n−1 (n=2–11) were detected. Species such as C4H3, C5H5, and C6H5 may also be produced in the process. Many such species have been identified for the first time. The presence of these species is evaluated by comparison with results from optical spectroscopy and threshold ionization mass spectrometry.