Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures

Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures
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DOI:
10.1126/science.1260139
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发表时间:
2014-12-12
期刊:
影响因子:
56.9
通讯作者:
Cheng, Gary J.
Cheng, Gary J.
中科院分区:
综合性期刊1区
文献类型:
--
作者:
Gao, Huang;Hu, Yaowu;Cheng, Gary J.

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我们报告了一种低成本,高通量的台式方法,该方法可以通过产生超高应变速率变形,使金属薄层具有纳米级精度。激光冲击印记可以在环境条件下产生三维晶体金属结构,其超齿表面小至10纳米。该技术可成功地制造了大面积,均匀的纳米图案,其宽高比高达5,用于等离子和传感应用,以及机械增强的纳米结构和金属晶格杂种纳米电视。
We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.