Analysis of the lateral resolution of electrostatic force gradient microscopy
Analysis of the lateral resolution of electrostatic force gradient microscopy
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静电力梯度显微镜横向分辨率分析
DOI：
10.1063/1.4752430
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发表时间：
2012
影响因子：
3.2
通讯作者：
A. Titkov
中科院分区：
文献类型：
--
作者：
M. Dunaevskiy;P. Alekseev;P. Girard;A. Lashkul;E. Lähderanta;A. Titkov
静电力梯度显微镜（EFGM）测量的信号是原子力显微镜（AFM）的探针和所研究的表面之间作用的静电力的z梯度。提出了一个模型，用于计算的z梯度的静电相互作用的AFM探针与局部电荷在表面的介电层。在EFGM模式中，应考虑电荷仅与探针尖端的相互作用。在这种方法中，可以导出用于计算静电力的z梯度的简化表达式。该模型使得有可能估计EFGM成像的个别收费的横向分辨率限制，并模拟实验EFGM图像的尖端表面的距离和尖端半径的函数。该模型的充分性得到证实，通过定量模拟的实验EFGM图像的局部电荷注入到一个平面阵列的Si纳米晶体在Si衬底上的薄SiO2层的AFM探针。
Signal measured by electrostatic force gradient microscopy (EFGM) is the z-gradient of the electrostatic force acting between the probe of an atomic force microscope (AFM) and the surface under study. A model is presented for calculating the z-gradient of the electrostatic interaction of the AFM probe with local charges in a dielectric layer at the surface. In the EFGM mode, the interaction of charges with only the probe tip apex should be taken into account. In this approach, a simplified expression can be derived for calculating the z-gradient of the electrostatic force. The model makes it possible to estimate the lateral resolution limit for EFGM imaging of individual charges and to simulate experimental EFGM images as a function of the tip-surface distance and the tip radius. The adequacy of the model was confirmed by quantitative simulation of the experimental EFGM images of local charges injected from the AFM probe into a planar array of Si nanocrystals in a thin SiO2 layer on a Si substrate.