A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges
A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges
复制标题
电容耦合射频放电的混合一维模型
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
U. Czarnetzki
中科院分区：
文献类型：
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作者：
B. Heil;R. Brinkmann;U. Czarnetzki
建立了一个一维数值模型，用于研究射频放电等离子体边界鞘层中的电子动力学。它包含几个不同的模块。首先，基于流体的等离子体边界鞘层模型和伴随的等效电路模型被用来计算由于鞘层中的位移电流和带电粒子密度的随时间变化的电场。然后将该模型中计算的电场与欧姆电场或传导电流场相结合，并加入到等离子体体的简化模型中。然后，在蒙特卡罗模拟中使用该组合来计算电子能量分布函数。该模型包括随机和欧姆加热的电子。该模型再现实验测量的电子能量概率函数在很宽的压力范围内。
A one-dimensional, numerical model was developed to aid in the investigation of electron dynamics in the plasma boundary sheath of RF discharges. It incorporates several different modules. A fluid based plasma boundary sheath model and an accompanying equivalent circuit model are first used to calculate the time-dependent electric field due to displacement current and charged particle densities in the sheath. The electric fields calculated in this model are then combined with the Ohmic electric field or the field due to conduction current and joined to a simplified model of the plasma bulk. This combination is then used in a Monte Carlo simulation to calculate the electron energy distribution function. This model includes stochastic and Ohmic heating of electrons. The model reproduces experimentally measured electron energy probability functions over a broad range of pressures.