A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability
A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability
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DOI：
10.1109/jmems.2008.2004794
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发表时间：
2008-12-01
影响因子：
2.7
通讯作者：
Ayazi, Farrokh
中科院分区：
文献类型：
--
作者：
Zaman, Mohammad Faisal;Sharma, Ajit;Ayazi, Farrokh
本文报道了一种面内模式匹配音叉陀螺(M-2-TFG)的设计、制作和特性。M-2-TFG使用单晶硅微结构的两个高品质因数(Q)共振弯曲模式来检测绕法向轴的角速度。在模式匹配条件下运行该器件，即在驱动模式和检测模式之间进行零赫兹频率分割，可以实现速率灵敏度的Q因数机械放大，还可以提高器件的整体噪声底限和偏置稳定性。M-2-TFG是在绝缘体上的硅衬底上制造的，使用了器件和手柄层硅刻蚀的组合，从而消除了在样件上需要任何释放开口的需要，从而使单位面积的质量最大化。实验数据表明，对于60亩m厚的1.5 mm x 1.7 mm足迹M-2-TFG原型，每小时亚度的布朗噪声底板与测量的Allan偏差偏置不稳定性为0.15度/小时。该陀螺仪在真空中的开环速率灵敏度约为83 mV/度/S。
In this paper, we report on the design, fabrication, and characterization of an in-plane mode-matched tuning-fork gyroscope (M-2-TFG). The M-2-TFG uses two high-quality-factor (Q) resonant flexural modes of a single crystalline silicon microstructure to detect angular rate about the normal axis. Operating the device under mode-matched condition, i.e., zero-hertz frequency split between drive and sense modes, enables a Q-factor mechanical amplification in the rate sensitivity and also improves the overall noise floor and bias stability of the device. The M-2-TFG is fabricated on a silicon-on-insulator substrate using a combination of device and handle-layer silicon etching that precludes the need for any release openings on the proof-mass, thereby maximizing the mass per unit area. Experimental data indicate subdegree-per-hour Brownian noise floor with a measured Allan deviation bias instability of 0.15 degrees/hr for a 60-mu m-thick 1.5 mm x 1.7 mm footprint M-2-TFG prototype. The gyroscope exhibits an open-loop rate sensitivity of approximately 83 mV/degrees/s in vacuum.