Effect of film gradient profile on adhesion strength, residual stress and effective hardness of functionally graded diamond-like carbon films
Effect of film gradient profile on adhesion strength, residual stress and effective hardness of functionally graded diamond-like carbon films
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DOI：
10.1016/j.apsusc.2014.05.161
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发表时间：
2014-08
影响因子：
6.7
通讯作者：
Yoo Jai Won;H. Ki
中科院分区：
文献类型：
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作者：
Yoo Jai Won;H. Ki
首次研究了连续变化的薄膜梯度分布对沉积在不锈钢衬底上的类金刚石(DLC)薄膜的结合强度、残余应力和有效薄膜硬度的影响。研究了具有五种多项式轮廓(线性、二次、三次、平方根和三次根轮廓)的精密梯度类金刚石薄膜，并与纯DLC薄膜进行了比较，结果表明，通过优化薄膜梯度轮廓可以显著改善薄膜的残余应力和附着力，但对薄膜的有效硬度有负面影响。
We have studied, for the first time, the effect of continuously-varying film gradient profiles on the adhesion strength, residual stress, and effective film hardness of diamond-like carbon (DLC) films deposited on stainless steel substrates. Precisely graded DLC films with five polynomial profiles (linear, quadratic, cubic, square root and cubic root profiles) were investigated and compared with pure DLC films, and it was shown that by optimizing the film gradient profile the residual stress and adhesion characteristics can be significantly improved but the effective film hardness can be negatively affected.