A compact and low-power CMOS circuit for fully integrated NEMS resonators
A compact and low-power CMOS circuit for fully integrated NEMS resonators
复制标题
DOI：
10.1109/tcsii.2007.892228
复制
发表时间：
2007-05-01
影响因子：
4.4
通讯作者：
Perez-Murano, Francesc
中科院分区：
文献类型：
--
作者：
Arcamone, Julien;Misischi, Bertrand;Perez-Murano, Francesc
这篇简介介绍了一种完全集成的纳米机电系统(NEMS)谐振器，可在兆赫范围内工作，并带有紧凑的内置CMOS接口电路。建议的低功率第二代电流传输器电路允许详细读出纳米悬臂梁结构，用于提取等效电路模型或在不同压力和直流偏置条件下进行比较研究。在这一意义上，我们给出了一个实际的混合机电系统的广泛的实验结果，该系统是通过内部标准的CMOS技术和纳米器件的纳米模板光刻后处理相结合而集成的。所提出的读出方案可以很容易地适应于将纳米悬臂梁作为独立的NEMS振荡器进行闭环操作。
This brief presents a fully integrated nanoelectromechanical system (NEMS) resonator, operable at frequencies in the megahertz range, together with a compact built-in CMOS interfacing circuitry. The proposed low-power second-generation current conveyor circuit allows detailed read-out of the nanocantilever structure for either extraction of equivalent circuit models or comparative studies at different pressure and dc biasing conditions. In this sense, extensive experimental results are presented for a real mixed electromechanical system integrated through a combination of in-house standard CMOS technology and nanodevice post-processing by nanostencil lithography. The proposed read-out scheme can be easily adapted to operate the nanocantilever in closed loop operation as a stand-alone NEMS oscillator.