Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement
Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement
复制标题
通过检测白光干涉仪中的扫描位置进行信号校正，以实现精确的表面轮廓测量
DOI：
10.1364/ao.58.003548
复制
发表时间：
2019-05-01
期刊：
影响因子：
1.9
通讯作者：
Pu, Jixiong
中科院分区：
文献类型：
--
作者：
Luo, Songjie;Suzuki, Takamasa;Pu, Jixiong
为了利用白光扫描干涉仪（WLSI）执行精确的表面轮廓测量，利用附加干涉仪检测随时间变化的实际光程差（OPD），在附加干涉仪中使用WLSI的光源和光学带通滤波器。该干涉仪简单地装备在WLSI中，并且不会对WLSI产生负面影响。真实的OPD可以很容易地从干扰信号中计算出，其信号处理与在VLSI中的信号处理相同。用真实的OPD值或真实的扫描位置值校正LSI的干涉信号。用插值法得到了采样间隔一定的校正后的干涉信号。用这种校正方法，3 μ m高的台阶形状的表面轮廓被精确测量，误差小于2nm。(C)2019美国光学学会
In order to perform an exact surface profile measurement with a white-light scanning interferometer (WLSI), an actual optical path difference (OPD) changing with time is detected with an additional interferometer in which the light source of the WLSI and an optical band-pass filter are used. This interferometer is simply equipped in the WLSI and does not negatively influence the WLSI. The real OPD is easily calculated from an interference signal with the same signal processing as that in the WLSI. The interference signal of the WLSI is corrected with the real OPD values or the real scanning position values. The corrected interference signal with a constant sampling interval is obtained with an interpolation method. With this correction method, a surface profile with a step shape of 3-mu m height is measured accurately with an error less than 2 nm. (C) 2019 Optical Society of America