銅膜材の疲労破壊特性に及ぼす圧延方向の影響( 材料のミクロ・メゾ評価)
銅膜材の疲労破壊特性に及ぼす圧延方向の影響( 材料のミクロ・メゾ評価)
复制标题
轧制方向对铜膜材料疲劳断裂性能的影响（材料的微观细观评价）
DOI：
10.1299/kikaia.65.461
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
明英 中村
中科院分区：
文献类型：
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作者：
鳥居 太始之;憲一 清水;明英 中村
近年来，薄膜作为电子部件的小尺寸和轻重量材料已被广泛使用。因此，了解薄膜的机械性能非常重要。为了这些部件的可靠性，特别需要评估膜的疲劳断裂特性。在这项研究中，轧制方向的铜膜的影响滑动开始，微裂纹的萌生，和疲劳寿命进行了研究。在薄膜疲劳试验中，制备了轧制方向平行于加载方向和垂直于加载方向两种试样。并利用边界元法计算了应力强度因子。结果，滑动和裂纹开始在更少的周期数和更低的应力幅加载到垂直方向比在加载到平行方向的膜。相反，垂直方向加载的膜中的裂纹比平行方向加载的膜中的裂纹传播得慢。两种试件表面裂纹观察结果存在差异。其原因可能是由于晶界的变形约束是不同的根据轧制拉伸晶粒的纵横比。
In recent years, films have been widely used as the small-sized and light-weight materials for electronic parts. Therefore, it is important to know mechanical properties of the film. For reliability of these parts, it is particularly necessary to evaluate fatigue fracture properties of the film. In this study, the effect that rolling direction of the copper film influenced slip initiation, microcrack initiation, and fatigue life was studied. The two types of specimen that rolling direction was parallel and perpendicular to loading direction were prepared in film fatigue testing. moreover, stress intensity factors were calculated using BEM analysis. As a result, a slip and a crack initiate at less number of cycles and lower stress amplitude in the film loaded to the perpendicular direction than in that loaded to the parallel direction. Conversely, a crack in the film loaded to the perpendicular direction propagates slower than that in the film loaded to the parallel direction. There was a difference between the two types of specimen in crack observation on the specimen surface. The reason was probably that deformation restraint due to grain boundary was different in accordance with the aspect ratio of the grain stretched by rolling.